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PECVD Tube Furnace

The PECVD tube furnace is a plasma gas phase deposition tube furnace system, which consists of a quartz reaction chamber, a radio frequency power supply, a multi-channel gas mixing system, a vacuum unit, and a reaction control system. The furnace uses high-purity alumina fiber material, and the surface is coated with imported high-temperature alumina coating to extend the service life of the instrument and improve heating efficiency. A radio frequency induction device is installed in front of the traditional chemical vapor deposition to ionize the reaction gas and generate plasma. The high activity of the plasma accelerates the reaction. It has good uniformity and repeatability, can form films over a large area, can form films at low temperatures, has excellent step coverage, and is easy to control the composition and thickness of the film and easy to industrialize. It is widely used in the growth of thin films such as graphene, silicon monoxide, silicon nitride, silicon oxynitride, and amorphous silicon (A-SI: H).

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Product Information
Furnace tube size (MM) Operating temperature (°C) Vacuum degree Power(KW) Voltage Heating elements Heating rate
Φ60*2200 1100°C -0.1MPA
10PA
6.67*10- 4PA		 3 220/380V Resistance wire 1-20°C/MIN
Φ80*2200 3
Φ100*2200 4
Φ120*2200 5
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Zhejiang Nengcheng Crystal Fiber Co., Ltd.
Zhejiang Nengcheng Crystal Fiber Co., Ltd.
Zhejiang Nengcheng Crystal Fiber Co., Ltd. was established in 2015. It is a professional enterprise that develops and produces ultra lightweight energy-saving high-temperature materials, and sells experimental electric furnaces, industrial electric furnaces, and non-standard customized electric furnaces. Professional PECVD Tube Furnace Manufacturers and PECVD Tube Furnace Factory. The company adheres to the principle of "survival through quality, development through reputation" and upholds the business philosophy of "practicality, integrity, and efficiency". We are committed to providing comprehensive and high-quality equipment solutions for customers in industries such as ceramics, metallurgy, electronics, glass, and chemical engineering. We also provide services such as powder roasting, ceramic sintering, and high-temperature experiments to universities, research institutes, and industrial and mining enterprises. At the same time, we are also striving to promote the strategic development of Nengcheng's lightweight, energy-saving, and environmentally friendly high-temperature alumina fiber in the field of new furnaces, and strive to become an internationally leading advanced high-temperature equipment industry service provider. Custom PECVD Tube Furnace Suppliers in China.
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