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PECVD Furnace System
This product is a medium-sized, slide-open PECVD system. This PECVD Tube Furnace System is equipped with a plasma RF power supply, a three-way mass flow gas mixing system (with ranges of 1-100 SCCM, 1-200 SCCM, and 1-200 SCCM), a 60mm diameter open tube furnace (with vacuum flange and connecting piping), and a mechanical pump.
Product Information
| Product Model | Sliding PECVD Tube Furnace System——OYS-1200C-II-60-PECVD (Φ60) |
| Main product parameters | Power supply: 220V 50/60Hz; Rated power: 3.1 kW; Maximum operating temperature: 1200°C (<0.5 h); Continuous operating temperature: ≤1100°C; Recommended heating rate: ≤10°C/min; Heating zone length: 440mm; Thermocouple: K-type |
| Main Features | RF power supply can achieve plasma enhancement and significantly reduce the experimental temperature; rapid temperature rise and fall can be achieved by sliding the furnace body; the stress of the film can be controlled by the frequency of the RF power supply; the stoichiometry can be controlled by process adjustment; various materials such as SiOx, SiNx, SiOxNy and (a-Si:H) can be deposited |
| Heating element | Iron-chromium-aluminum alloy wire 0Cr21Al6Nb |
| Furnace tube size | Quartz tube diameter optional: Φ60 |
| Temperature control system | Includes a YD858 temperature controller; PID control and self-tuning adjustment, intelligent 50-segment programmable control, with over-temperature and burnout alarm functions; temperature control accuracy: ±1℃ |
| Plasma RF power supply | 300W RF power supply; Output power: 0~300W adjustable; RF frequency: 13.56MHZ; Automatic matching; Noise level < 50dB; Cooling method: Air cooling; Input voltage: 180~250V |
| Vacuum sealing flange interface | Standard configuration: a pair of stainless steel vacuum flanges and high-temperature silicone sealing rings; the outlet flanges are three-port flanges K16, KF25, and Φ8.2; the outlet flange can be connected to the KF25 adapter with a bellows and then to the vacuum pump. |
| vacuum pump | Adopt double rotary vane mechanical vacuum pump TRP-12; vacuum degree can reach 10-2torr; vacuum connection accessories are equipped with KF25 clamps and stainless steel bellows for connecting the tube furnace and vacuum pump |
| Gas supply system | Three-way mass flow mixing system - GYS-3Z; Power supply: 220V 50/60Hz; Measuring ranges: 1-100 SCCM, 1-200 SCCM, 1-500 SCCM; A mechanical pressure gauge is installed on the front panel and connected to the mixing pipe; Pressure gauge range: -0.1-0.15MPa; Mixing tank size: Φ80*120mm; Internal connecting pipe is Φ6.35 |
| Furnace structure | The furnace body can be moved left and right, and the RF power supply can be moved left and right. The furnace body and RF power supply are installed on the same slide rail and use the same quartz tube. |
| Certification standards and core components | The core components of the whole machine are in compliance with CE, UL, MET and other certification standards; the core components include ABB electrical components, UL certified wires and cables, Omega, Yudian, Continental instruments, etc. |
Contact Us
Zhejiang Nengcheng Crystal Fiber Co., Ltd.
Zhejiang Nengcheng Crystal Fiber Co., Ltd. was established in 2015. It is a professional enterprise that develops and produces ultra lightweight energy-saving high-temperature materials, and sells experimental electric furnaces, industrial electric furnaces, and non-standard customized electric furnaces. Professional PECVD Furnace System Manufacturers and PECVD Furnace System Factory. The company adheres to the principle of "survival through quality, development through reputation" and upholds the business philosophy of "practicality, integrity, and efficiency". We are committed to providing comprehensive and high-quality equipment solutions for customers in industries such as ceramics, metallurgy, electronics, glass, and chemical engineering. We also provide services such as powder roasting, ceramic sintering, and high-temperature experiments to universities, research institutes, and industrial and mining enterprises. At the same time, we are also striving to promote the strategic development of Nengcheng's lightweight, energy-saving, and environmentally friendly high-temperature alumina fiber in the field of new furnaces, and strive to become an internationally leading advanced high-temperature equipment industry service provider. PECVD Furnace System Custom.
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